Vacuum tube furnace is a device that heats materials at high temperatures in a vacuum or inert gas environment. Its operating principle is based on transferring heat generated by electric heating elements to the sample within a specific environment, achieving precise heat treatment. The specific process is as follows:

Electric heating element heating: Electric heating elements such as resistance wires and molybdenum silicon rods are placed within the furnace. When current flows through them, heat is generated and radiated into the furnace chamber.

Heat transfer: In a vacuum or inert gas environment, heat is transferred primarily through conduction (the thermal conductivity of gases in a vacuum is poor), supplemented by natural convection.

Environmental control: The furnace chamber is evacuated using a vacuum pump and, when necessary, filled with inert gases such as argon and nitrogen to prevent oxidation of the material.

The core components include the furnace body (including the outer shell, chamber, and inner lining), electric heating elements, a temperature control system (temperature sensor, PID controller), a vacuum/inert gas system (vacuum pump, valves, gas source), and a sample holder and transmission mechanism.

Vacuum Tube Furnace Core Components

Furnace Structure: Consists of an outer shell, furnace chamber (commonly made of 99% corundum tubes), and an alumina fiber insulation layer to ensure thermal insulation and high-temperature resistance.
Temperature Control System: Consists of a closed-loop control system consisting of thermocouples, PID intelligent regulators, and thyristors for high-precision temperature control (e.g., imported single-loop intelligent temperature controllers).
Vacuum and Atmosphere System: Equipped with a vacuum pump, float flowmeter, and inert gas interface, it supports vacuuming and filling with protective gases (e.g., argon and nitrogen).
Heating Elements: Utilize high-quality silicon-molybdenum rods for fast heating and long life, suitable for high-temperature environments.

Applications and Typical Scenarios of Vacuum Tube Furnaces

1.Material Science and R&D

High-temperature, medium-temperature, and low-temperature chemical vapor deposition (CVD), such as ZnO nanostructure growth and silicon nitride coating.
New material synthesis and performance optimization, supporting ceramic substrate conductivity testing, MLCC atmosphere sintering, and more. Industrial Production and Processing

Metallurgy: Annealing, quenching, and tempering of metal materials to improve mechanical properties and corrosion resistance.

Ceramics and Glass: Precisely control the firing process to ensure product density and hardness.

Semiconductors and Electronic Devices

PECVD/CVD Coating: Deposition of silicon and metal thin films for integrated circuit and optoelectronic device production.

A vacuum environment reduces pollution and improves the reliability of electronic devices.

2.Research and Environmental Protection

Laboratory elemental analysis, high-temperature waste incineration, and resource recovery.

Clean Energy: Biomass energy conversion and solar material preparation.

Equipment Features, Usage Instructions, and Maintenance Tips

Vacuum Tube Furnaces Core Performance Features

High Precision and Efficiency: The multi-station design supports independent temperature control, improving equipment utilization; excellent temperature uniformity and rapid heating.

Vacuum Protection: Prevents material oxidation, making it suitable for processing sensitive materials; an optional inert gas atmosphere expands application scenarios.

Operational Convenience: Intermittent manual loading and unloading, a user-friendly interface, and support for automatic temperature control. Usage and Maintenance Precautions

Vacuum Tube Furnaces Operating Instructions

Pre-treatment for First Use: Bake at 120°C for 1 hour and 300°C for 2 hours to prevent furnace cracking.
Safe Operation: Do not operate above the rated temperature and avoid pouring liquid or molten metal into the furnace.

Vacuum Tube Furnace Parameters

Model	Max temperature	Heating zone length	Constant temperature zone length	Power and voltage	Furnace tube size	Dimensions
YXG-1200-A1	1200℃	200mm	60mm	1.5kW/AC220V	φ30/50*500mm	800*340*400mm
YXG-1200-A2	1200℃	440mm	120mm	3kW/AC220V	φ30/100*1000mm	1120*480*530mm
YXG-1200II-200	1200℃	200+200mm	200mm	3KW/AC220V	φ30/100*1000mm	1100*420*560mm
YXG-120OIII-200	1200℃	3*200mm	3*60mm	4.5KW/AC220V	φ30/100*1000mm	1400*420*560mm
YXG-1400-400	1400℃	400mm	120mm	5kW/AC220V	φ30/100*1000mm	1200*500*660mm
YXG-140OIl-200	1400℃	200+200mm	200mm	5kW/AC220V	φ30/100*1000mm	1200*500*660mm
YXG-1700-290	1700℃	290mm	80mm	6kW/AC220V	φ30/100*1000mm	1300*640*870mm

Vacuum Tube Furnace Video

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