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Alumina Tube Furnace

Alumina Tube Furnace

Scope of application

It is mainly used in high temperature processes that need to avoid metal contamination, such as annealing of semiconductor wafers (to prevent the diffusion of impurities such as iron and nickel), sintering of high-purity ceramic materials (aluminum nitride, zirconium oxide), and so on.

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Alumina Tube Furnace

alumina tube furnace is a high-temperature heat treatment device that utilizes high-purity alumina ceramic tubes as heating and reaction tubes. Alumina (Al₂O₃) possesses excellent high-temperature strength, chemical stability, and wear resistance, making this type of tube furnace particularly suitable for heat treatment experiments or production in high-temperature oxidizing atmospheres, corrosive environments, and high vacuum conditions.

Alumina Tube Furnace

II. Structure

Furnace Body

Double-layer steel shell construction, the outer shell is typically air-cooled.

Interior insulation: vacuum-formed alumina fiber or composite lightweight bricks.

Heating Element

MoSi₂ (molybdenum silicon rod): 1650–1800°C (commonly used).

SiC (silicon carbide rod): 1400–1500°C (commonly used).

Low-temperature version available: high-resistance wire (FeCrAl).

Heating Tube (Core)

Material: 99% high-purity alumina (Al₂O₃)

Temperature Resistance: ≤1800°C

Dimensions: Common inner diameters Φ40–150 mm, lengths 500–2000 mm

Temperature Control System

PID Intelligent Temperature Controller

Supports multi-stage programmable heating curves.

Accuracy: ±1°C ℃

Sealing and Atmosphere System

Flange + O-ring Seal

Can accept air, nitrogen, argon, hydrogen, and other atmospheres

Can be connected to a vacuum pump to achieve low pressure or high vacuum

III. Performance Characteristics

Excellent High-Temperature Resistance: High-purity alumina tubes can withstand long-term operating temperatures up to 1700℃ and transient temperatures up to 1800℃ ℃

Strong chemical stability: Resists acid and alkali corrosion, inert to most molten metals and slag

Excellent airtightness: Maintains a stable seal under vacuum and high pressure

Low thermal expansion coefficient: Excellent thermal shock resistance, not prone to cracking

Multi-temperature control: Enables long uniform temperature zones or temperature gradients

IV. Application Areas

Material Science Research

High-temperature ceramic sintering, powder metallurgy, single crystal growth

New Energy Materials

Calcination of lithium battery cathode materials (lithium iron phosphate, ternary materials)

Chemistry and Catalysis

Catalyst carrier calcination, chemical vapor deposition (CVD), gas-solid reaction

Metallurgy and high-temperature processing

Metal oxidation, reduction, carburizing, and nitriding

Vacuum and atmosphere experiments

High vacuum heat treatment, inert gas sintering

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